Verfahren zur auswertung von interferogrammen und interferometer

Interferogram evaluation method with coherent noise effect suppression - producing phase plot from interferogram, shifting components, taking further plot and recording using coherent light

Abstract

The method involves recording an interferogram or a group of interferograms and produces a phase plot from it or them in a computer (10). A relative motion is performed between the interferogram components emanating from a test object (5) and those originating by reflection or scattering at other optical components. One further phase plot is then produced and the interferogram is taken using spatially and timewise coherent light. USE/ADVANTAGE - Enables suppression of effect of interference of coherent noise on phase difference between test object and reference waves in interferometer with simultaneously high contrast.

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Cited By (8)

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    DE-102004008750-A1July 07, 2005Carl Zeiss Smt Ag, Schott AgControl for optical properties in a material for optical applications accurately defines powers of lenses and their differences on a sample of material related to a reference sample
    DE-102004008750-B4August 24, 2006Carl Zeiss Smt Ag, Schott AgVerfahren zur Qualitätskontrolle der optischen Eigenschaften eines optischen Materials mittels Bestimmung der Brechwerte
    DE-19513233-A1October 10, 1996Andreas Dr Ing EttemeyerVerfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
    DE-19513233-C2January 04, 2001Andreas EttemeyerVerfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
    DE-19513234-A1October 10, 1996Ettemeyer Andreas Dr IngDetermination of phases and phase differences of light reflecting from specular or diffusely reflecting, or transparent surface of object
    DE-19513234-C2February 22, 2001Ettemeyer AndreasVerfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
    DE-19626261-A1January 02, 1997Nippon Kogaku KkIC pattern and metal surface test object observation differential interference microscope
    US-5764363-AJune 09, 1998Nikon CorporationApparatus for observing a surface using polarized light